Laurell spinner is capable of handling both masks and wafers. There are 4 recipes available:
1). 300MIF30s: Develop with 300MIF for 30s
2). 300MIF60s: Develop with 300MIF for 60s
3). AZ400K30s: Develop with AZ400K:D.I. H2O=1:4 fo
The new power level is set to 90% (was 60%);
Spot size correction: x = -200nm; y = -200nm (was x = -150nm; y = -150nm);
Depth of Focus remains the same as before (DeFoc = 1950).
The above correction is based on developing the mask using the "AZ400KMask"
recipe on Laurell spinner, and etching it with "Program #1" on Polos spinner.
With the above setup/parameters, minimal features as small as 1um i
1). beam drift
The drift was caused by a damaged end cap, which happened when the sample moved too close to the lens. Scratches were clearly visible on the cap.
As a reminder, for future use of Raith, please place your sample at a safe distance away from the lens. The column is optimized to work at 11mm WD. Smaller WD won't necessarily result in better resolution.
A small leak was detected between the gun and chamber.Yesterday ,the service engineer pulled out the gun valve, and found it to be literally fried by arcing.
The arcing happened between the gun valve and the liner. When EHT <= 20kV, the inlens detector was enabled, which set the liner voltage to 8kV. It was the liner voltage that caused the arcing. Raith is looking into the problem. In the mean time, to minimize arcing, please use EHT>20kV for your ebeam job.
Tystar Polysilicon Tube (#2) Down
The Tystar Polysilicon Tube (#2) is down due to excessive gasket leakage. The gaskets around the silane injection ring appears to have aged and hardened so that an adequate seal is not made to the quartz tube surface. The tube will have to be cooled to room temperature, the door disassembled, all the gaskets replaced, the door reassembled, the tube leak checked, and the tube reheated. This is tentatively scheduled for Wednesday and Thursday, May 25th and 26th.