Raith ebeam updates - continued
2). vacuum leak
A small leak was detected between the gun and chamber.Yesterday ,the service engineer pulled out the gun valve, and found it to be literally fried by arcing.
The arcing happened between the gun valve and the liner. When EHT <= 20kV, the inlens detector was enabled, which set the liner voltage to 8kV. It was the liner voltage that caused the arcing. Raith is looking into the problem. In the mean time, to minimize arcing, please use EHT>20kV for your ebeam job.