Laurell Spinner is back online
The Laurell spinner is back online and locked out. Due to some changes in its operation, previously authorized users will have to go through the training process again.
Laurell spinner is capable of handling both masks and wafers. There are 4 recipes available:
1). 300MIF30s: Develop with 300MIF for 30s
2). 300MIF60s: Develop with 300MIF for 60s
3). AZ400K30s: Develop with AZ400K:D.I. H2O=1:4 for 30s
4). AZ400KMASK: Develop with AZ400K:D.I. H2O=1:4 for 60s (Designed for Standard Cr Mask)