Electronic Micro Systems / 1000-1
Manufacturer: Electronic Micro Systems
Classification: Lithography
Equipment: Hotplate
Use: Baking
Use: Baking
General Information and Usage
EMS 1000 hot plate is located in the nanoimprint hood. It is used for pre-baking and/or cleaning wafers for nanoimprinting. The maximum temperature is 250º C. Two bake styles are available: contact and vacuum bake. During the vacuum bake the substrate is held in intimate contact by vacuum ports in the chuck itself. The vacuum is turned on manually. In contact bake, the substrate is held against the surface of the chuck by gravity alone (no vacuum pulling on the substrate).
Click here to view a map to the Electronic Micro Systems / 1000-1.
Operating Instructions and Training
The hotplates do not require training or authorization, but please ask the staff if you need help.
Contact Information for Users
For additional information regarding this machine, please contact the PRISM Staff at: MNFL-Staff@princeton.edu.