Angstrom Dielectric Sputter System
Manufacturer: Angstrom Engineering
Equipment: Sputter Coater
Use: Sputter dielectric films AlN, SiO2, SiNx
This is a RF magnetron, confocal sputtering system, used for depositing dielectrics. It has three guns, three targets (SiO2, Al2O3, and ZnO), and three power supplies with the maximum output power of 500 W. Two separate gas lines with two MCFs are available. First gas line (Gas 1) goes to the chamber. The second gas line (Gas 2) feeds to the chimney of the guns. Argon is connected to Gas 1 and O2 to Gas 2. The system is pumped by a turbo pump backed by a mechanical pump. A gate valve separates the vacuum chamber from the pump.
Operating Instructions and Training
Please follow the provided authorization and training form.
Contact Information for Users
For additional information regarding this machine, please contact the PRISM Staff at: MNFL-Staff@princeton.edu.
|Last Name||First Name||Sign||Rank||Trained by:||Authorized by:||User since:|
|Avasthi||Sushobhan||savasthi||User||Angstrom Eng.||J. Palmer||Sep-13|
|Nagamatsu||Ken||knagamat||User||Angstrom Eng.||J. Palmer||Sep-13|