Princeton University

Manufacturer: Angstrom Engineering
Classification: Metals/Dielectrics
Equipment: Sputter coater
Use: Sputter Al, Al+1%Si, Au, Cr, Mo, Ni, Pt, Ti, TiW, and W      

The Angstrom metal sputterer is a three-source sputterer with a load lock. It has two DC and one RF power supplies with a maximum output power of 2.5 kW and 600 W, respectively. Co-deposition from two different targets is also possible and can be accomplished by running either one of the DC and the RF power supplies. The system is pumped by a cryo pump. At present, argon is the only carrier gas. There are three thickness monitors installed, one for each target, plus an additional monitor for total thickness. The available targets are: Al, Al+1%Si, Au, Cr, Mo, Ni, Pt, Ti, TiW, and W.

Click here to view a map to the Angstrom Sputterer.

Please follow the provided authorization and training form.

Operating Instructions

For additional information regarding this machine, please contact the PRISM Staff at: MNFL-Staff@princeton.edu.