CVD 2 Stack Furnace
Classification: Thermal Process
Equipment: Horizontal tube furnaces
Use: Tube 1 Wet Oxidation, Tube 2 sealed ampoule diffusion
CVD 2 Stack Furnace is a dual-tube furnace. The lower tube is a 4-inch-diameter, single-zone tube for sealed-ampoule diffusion. No gas or exhaust connects to the tube. The upper tube is a three-zone furnace for wet oxidation. It has two N2 gas lines connected to the tube. (Two additional gases can be added utilizing the two spare gas lines and flow meters.) The left flow meter controls the gas directly fed into the tube. It has a full scale of 20 L/min. The right flow-meter controls the gas flow into the bubbler. It has a full scale of 2 L/min. Limited by the type of thermocouple used, the maximum temperature is 800°C for both tubes.
Click here to view a map to the CVD 2 furnace.
Operating Instructions and Training
Please follow the provided authorization and training form.
Contact Information for Users
For additional information regarding this machine, please contact the PRISM Staff at: MNFL-Staff@princeton.edu.