Dektak / IIa
Classification: Dektak/ IIa
Equipment: Surface Profilometer
Use: Measure the vertical surface profile
The Dektak consists of two parts: the Dektak itself, and the computer to its left that is used to control the machine. This machine is used to measure the vertical surface profile of a sample. A diamond-tipped stylus is lowered onto the sample, and the stage is slowly translated, causing the stylus to move up and down vertically as it moves along the surface. The vertical motion of the stylus is measured electrically and converted to a digital format. Any sample with a reasonably hard surface (hard-baked photoresist is fine) with a vertical range of 100 Å to 655 kÅ can be measured. Vertical resolution can be as low as 10 Å. Maximum sample thickness is 20 mm. The profile can be viewed on the screen and saved to disk to be printed. For information in addition to that provided here, consult the user’s manual (Veeco Meteorology Group, Dektak), located in the characterization lab. No authorization required. Follow the operating instructions.
Click here to view a map to the Dektak.
Operating Instructions and Training
Training for this and several other metrology tools may be accomplished in a single session tutorial. Contact the MNFL staff for details.
Contact Information for Users
For additional information regarding this machine, please contact the PRISM Staff at: MNFL-Staff@princeton.edu.