Denton / DV-502 A E-Beam Evaporator
Manufacturer: Denton Vacuum
Equipment: Electron beam evaporator
-Thin film deposition
Operating Instructions and Training:
Please follow the provided authorization and training form.
For additional information regarding this machine, please contact the PRISM Staff at: MNFL-Staff@princeton.edu.
General Information and Usage
Denton e-beam is a single-chamber system for the thin-film evaporation. A maximum of four different materials can be evaporated in one pump-down cycle, from the four pocket electron gun. The thickness of the metal is monitored in-situ by a thickness monitor. Substrates up to 5 inch diagonal can be attached to the rotating substrate holder. The sample temperature usually does not exceed 35oC. The available materials are: Au, Ag, Al, Cr, Ge, Ni, Pd, Pt, Si, SiO2, and Ti.
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