Equipment: Thermal evaporator
-Thin film deposition
Operating Instructions and Training:
Please follow the provided authorization and training form.
For additional information regarding this machine, please contact the PRISM Staff at: MNFL-Staff@princeton.edu.
General Information and Usage
The Edwards E306A Thermal Evaporator will evaporate a metal film over a substrate whose melting/softening point is higher than about 300°C. The metal source to be evaporated is placed in a filament or crucible, in which a large current is passed. The metal melts, and evaporates on the target substrate above the source, producing a film. Only metal or semiconductor targets should be used. The thickness of the metal is monitored in-situ by a thickness monitor. Even though the turret can accommodated up to four different materials, exchanged by manual rotation, the most common practice is to evaporate single material in one pump-down cycle. Often Al or Cr is evaporated, but the users are allowed to bring other materials. The evaporator has been used for Au-Zn deposition and for Indium evaporation, so the resulting contamination and pumping limitation (due to the high vapor pressure of Zn) should be taken into consideration.
Click here to view a map to the Edwards E306A Thermal Evaporator.