Edwards/E306A
Manufacturer: Edwards
Classification: Metals/Dielectrics
Equipment: Thermal evaporator
Use: Thin film deposition
General Information and Usage
The Edwards E306A Thermal Evaporator will evaporate a metal film over a substrate whose melting/softening point is higher than about 300°C. The metal source to be evaporated is placed in a filament or crucible, in which a large current is passed. The metal melts, and evaporates on the target substrate above the source, producing a film. Only metal or semiconductor targets should be used. The thickness of the metal is monitored in-situ by a thickness monitor. Even though the turret can accommodated up to four different materials, exchanged by manual rotation, the most common practice is to evaporate single material in one pump-down cycle. Often Al or Cr is evaporated, but the users are allowed to bring other materials. The evaporator has been used for Au-Zn deposition and for Indium evaporation, so the resulting contamination and pumping limitation (due to the high vapor pressure of Zn) should be taken into consideration.
Click here to view a map to the Edwards E306A Thermal Evaporator.
Operating Instructions and Training
Please follow the provided authorization and training form.
Contact Information for Users
For additional information regarding this machine, please contact the PRISM Staff at: MNFL-Staff@princeton.edu.