Gaertner Ellipsometer
Manufacturer: Gaertner Scientific L3W16 Ellipsometer
Classification: Measurement
Equipment: Multi-wavelength, variable angle ellipsometer
Use: Measures thickness and index of refraction of thin dielectric and polymer films on reflective substrates.
General Information and Usage
This ellipsometer is used for measuring thickness and refractive index of transparent films, especially on a silicon substrate. A disadvantage of this technique is the calculated film thickness leads to multiple solutions, so before measurement you need to know the thickness range (within 2800 Å for SiO2). Alternatives are to use two wavelengths of light or two incident angles to find a unique solution.
Complex film structures may also be analyzed; see the MNFL staff for more information.
Click here to view a map to the Gaertner Ellipsometer.
Operating Instructions and Training
Training for this and several other metrology tools may be accomplished in a single session tutorial. See the MNFL staff for details.
Contact Information for Users
For additional information regarding this machine, please contact the PRISM Staff at: MNFL-Staff@princeton.edu