Heidelberg / DWL66
Manufacturer: Heidelberg Instruments
Equipment: Laser writer
-Writing masks and wafers up to 6"
-Front and back side alignment, metrology
Operating Instructions and Training:
Please follow the provided authorization and training form.
Brief Operating Instructions
Mask Design Rules for DWL66
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For additional information regarding this machine, please contact the PRISM Staff at: MNFL-Staff@princeton.edu.
General Information and Usage
The Heidelberg Instruments DWL66 is a laser lithography system used for direct writing patterns into UV sensitive media. The optical part of the system is composed of a GaN–based laser diode generating 405 nm UV light with 40 mW optical power, two acousto-optical modulators for fast laser scanning (pixel size 200 nm) and modulation, and two exchangeable writeheads. The 4 mm and 20 mm focal length writeheads provide minimum feature sizes about 0.8 µm and 4 µm, respectively.