Heidelberg / DWL66
Manufacturer: Heidelberg Instruments
Equipment: Laser writer
- Writing masks and wafers up to 6"
- Front and back side alignment, metrology
The Heidelberg Instruments DWL66 is a laser lithography system used for direct writing patterns into UV sensitive media. The optical part of the system is composed of a GaN–based laser diode generating 405 nm UV light with 40 mW optical power, two acousto-optical modulators for fast laser scanning (pixel size 200 nm) and modulation, and two exchangeable writeheads. The 4 mm and 20 mm focal length writeheads provide minimum feature sizes about 0.8 µm and 4 µm, respectively.
Operating Instructions and Training
Contact Information for Users
For additional information regarding this machine, please contact the PRISM Staff at: MNFL-Staff@princeton.edu.