Angstrom Engineering E-Beam

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Angstrom Engineering E-Beam

Manufacturer: Angstrom Engineering
Classification: Metals/Dielectrics
Equipment: Electron beam evaporator
Use: Thin film deposition of Ti, Pd, Ni, Au, Ge, Pt

General Information and Users

The Angstrom E-beam is a dual-chamber system for thin-film evaporation. The upper chamber is a load lock for increased pumping speed. A maximum of six different materials can be evaporated in one pump-down cycle, from the six pocket electron gun. The thickness of the metal is monitored in-situ by a thickness monitor. Substrates up to 6 inch diameter can be attached to the substrate holder. The sample temperature usually does not exceed 50 °C. Only the following materials are available: Au, Pd, Ge, Ni, Pt, and Ti.

Click here to view a map to the the Angstrom E-Beam.

Contact Information for Users

For additional information regarding this machine, please contact the PRISM Staff at: MNFL-Staff@princeton.edu.

Operating Instructions

Brief Operating Instructions

Authorized Users

Last Name	First Name	Sign	Rank	Trained by:	Authorized by:	User since:
Aung	Nyan Lynn	naung	User	J. Palmer	J. Palmer	Mar-11
Belasco	James	jbleasco	User	J. Palmer	J. Palmer	Jan-13
Bouzi	Pierre	pbouzi	User	J. Palmer	J. Palmer	Oct-12
Bozlar	Michael	mbozlar	User	J. Palmer	J. Palmer	Aug-10
Chang	Matthew	mpchang	User	A. Ravikumar	J. Palmer	Apr-13
Chin	Huai-An	huaichin	User	I. Mokina	J. Palmer	Jun-12
Chiu	YenTing	yentingc	User	P. Watson	P. Watson	Apr-11
Datta	Shubhashish	sdatta	User	J. Palmer	J. Palmer	Mar-11
Huang	Chiao-Ti	chiaoti	User	I. Mokina	J. Palmer	Jul-11
Huang	Xue	xuehuang	User	J. Palmer	J. Palmer	Oct-09
Jock	Ryan	rjock	User		J.Palmer	Feb-12
Kim	Jihoon	jnkim	User	I. Mokina	J. Palmer	Oct-10
Kim	Jin-Sung	jk3	User	J. Palmer	J. Palmer	May-13
Koduvayur Parthasarathy	Sunanda	skoduvay	User	I. Mokina	J. Palmer	Apr-12
Kong	Yong-Lin	yongkong	User	I. Mokina	J. Palmer	May-11
Le	Loan	lle	Superuser	J. Palmer	J. Palmer	Dec-09
Lee	Douglas	ddl	User	J. Palmer	J. Palmer	Dec-09
Li	Jiun-Yun	jiunyun	User	T. Lu	J. Palmer	Sep-10
Liu	Qiang	qiangliu	User	J. Palmer	J. Palmer	Oct-09
Martino	James	jmartino	User	I. Mokina	J. Palmer	Jul-12
Moroney	Mary	moroney	User	J. Palmer	J. Palmer	Jul-10
Nguyen	Thanh	tdnguyen	User	I. Mokina	J. Palmer	Oct-10
Ravikumar	Arvind	aravikum	Superuser	M.Escarra	J.Palmer	Mar-11
Sanz-Robinson	Josue	jsanz	User	I. Mokina	J. Palmer	Jun-11
Shrirao	Anil	anilshrirao	User	J. Palmer	J. Palmer	Jan-13
Sigillito	Anthony	asigilli	User	J. Palmer	J. Palmer	Nov-12
Song	Yu	yusong	User	M. Escarra	J.Palmer	Oct-10
Takita	Maika	mtakita	User	I. Mokina	J. Palmer	Jun-12
Vallikivi	Margit	mvalliki	Superuser	C. Tsay	J. Palmer	Jan-10
Wei	Mian	mianwei	User	J. Palmer	J. Palmer	Dec-11
Yao	Jie	jieyao	User	J. Palmer	J. Palmer	Oct-09
Yao	Yu	yuyao	User	J. Palmer	J. Palmer	Oct-09
Yeh	Yao-Wen	yyeh	User	I. Mokina	J. Palmer	Jun-11
Young	Elizabeth	ejtwo	User	J.Palmer	J. Palmer	Mar-12
Zheng	Mei Chai	meizheng	User	I. Mokina	J.Palmer	Mar-12

Princeton University

Angstrom Engineering E-Beam

General Information and Users

Contact Information for Users

Authorized Users