KLA-Tencor / P-15
Equipment: Surface Profiler
2D and 3D step profiles, stress measurement.
Operating Instructions and Training:
Please follow the provided authorization and training form.
General Information and Users
The KLA-Tencor P-15 profiler is a highly sensitive surface profiler that measures step height, roughness, and waviness on sample surfaces. It is equipped with a standard MicroHead that has a vertical range of 327 m m and is capable of scanning at forces between 1 mg and 50 mg. The maximum allowed substrate thickness is 20 mm and the maximum weight is 1lb. The radius of the diamond stylus tip is 2 m m with 60° cone angle. The dual-view optics provide the users with an opportunity to view sample from the top down and from the side. The top-down view has 115-465x magnification and is for accurate scan positioning. The side view, 90-410x optics are used to view the stylus tip as it passes over sample surface. The motorized stage enables automatic leveling and programmable rotation of the sample and can accommodate substrates up to 8 inches. The substrate is held by vacuum. The maximum horizontal scan length is 80 mm. The user can measure 2D or 3D profiles and perform stress measurement on 4-inch wafers using a special stage. The software is running on Windows NT operating system. Users can transfer their files via floppy, CD disks, or USB storage devices ("Diskonkey" recommended). The ultimate lateral resolution is 25 nm in x-direction and 1 m m in y-direction. However, the actual resolution is a function of stylus radius. The scan repeatability is 7.5 Å or 0.1% of step height, whichever is greater, and the reproducibility is 15 Å or 0.25% of step height, whichever is greater. The profiler is placed on an active vibration isolation table that suppresses the low-frequency building noise. It is essential that the table is turned on during the measurement! Do not lean on the table or place objects on top of the instrument.
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