Equipment: Digital thickness gauge
Use: Measure the thickness of substrates
General Information and Use
Mitutoyo digital indicator is a high-precision, vertical gauge used for measuring substrate thickness. The indicator is automatically zeroed when powered-on.
The resolution of the 256B unit is 1µm and a range of up to 12 mm. Since the applied measuring force is low, 0.4 - 0.7 N, use this unit for III-Vs and other fragile materials.
The resolution of the 523 indicator is 1µm and a range of up to 30 mm. Since the measuring force is > 2 N, use it for silicon and glass substrates.
Click here for a map to the Mitutoyo gauges.
Operating Instructions and Training
There are no log books for these tools.
Authorization is not required, but contact MNFL staff before using.
Contact Information for Users
For additional information regarding these machines, please contact the PRISM Staff at: MNFL-Staff@princeton.edu