Equipment: Digital thickness gauge
-Measure the thickness of substrates
Operating Instructions and Training:
-There are no log books for these tools.
-Authorization is not required, but contact MNFL staff before using.
For additional information regarding these machines, please contact the PRISM Staff at: MNFL-Staff@princeton.edu
General Information and Usage
- Mitutoyo digital indicator is a high-precision, vertical gauge used for measuring substrate thickness. The indicator is automatically zeroed when powered-on.
- The resolution of the 256B unit is 1µm and a range of up to 12 mm. Since the applied measuring force is low, 0.4 - 0.7 N, use this unit for III-Vs and other fragile materials.
- The resolution of the 523 indicator is 1µm and a range of up to 30 mm. Since the measuring force is > 2 N, use it for silicon and glass substrates.
Click here for a map to the Mitutoyo gauges.