RTP-600S Rapid Thermal Annealer
Manufacturer: Modular Process Technology Corp.
Classification: Thermal Process
Equipment: Silicon Rapid Thermal Annealer
Use: Ultra fast heating for annealing metal contacts (silicon)
General Information and Usage
Processing temperatures from 250ºC to 1300ºC are accessible. The temperature ramp rate may be up to a maximum of 150ºC/sec. The temperature repeatability is +/- 2ºC with an accuracy of +/- 2ºC. The temperature may be measured by a thermocouple or a pyrometer. A type K thermocouple is used from 250ºC to 800ºC. A pyrometer is used from 800ºC to 1300ºC. Process data may be collected during a run cycle and stored in a data file for later display and analysis. The process and recipe data files are internally stored as DIF (Data Interchange Format) and can be exported as text files.
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Operating Instructions and Training
Contact Information for Users
For additional information regarding this machine , please contact the PRISM Staff at: MNFL-Staff@princeton.edu.