Nanonex / NX2000-4
- Imprint on up to 6" wafer
- UV and temperature curing
The NX-2000 nanoimprinter is a lithography tool able to replicate patterns at the micro to the nanoscale. The pattern replication is done by a mechanical deformation of the resist materials with a mask. A mask typically has a high density of nanoscale protrusion features on its surface and is treated to prevent sticking to the resist.
Operating Instructions and Training
Please follow the provided authorization and training form.
Contact Information for Users
For additional information regarding this machine, please contact the PRISM Staff at: MNFL-Staff@princeton.edu.
|Last Name:||First Name:||Sign:||Rank:||Trained by:||Authorized by:||User since:|
|Austin||Robert||austin||User||H. Gao||H. Gleskova||Sep-05|
|Chen||Hao||haochen||User||C. Wang||M. Gaevski||Aug-10|
|Li||Siran||siranli||User||C. Wang||M. Gaevski||Aug-10|
|Nagamastu||Ken||knagamt||User||M. Gaevski||M. Gaevski||Jul-11|
|Tait||Alex||atait||User||Y. Sun||Y. Sun||Jan-14|
|Tyryshkin||Alexei||atyryshk||User||H. Gao||H. Gleskova||Jul-05|