Nanonex / NX2000-4
-Imprint on up to 6" wafer
-UV and temperature curing
Operating Instructions and Training:
Please follow the provided authorization and training form.
For additional information regarding this machine, please contact the PRISM Staff at MNFL-Staff@princeton.edu.
General Information and Usage
The NX-2000 nanoimprinter is a lithography tool able to replicate patterns at the micro to the nanoscale. The pattern replication is done by a mechanical deformation of the resist materials with a mask. A mask typically has a high density of nanoscale protrusion features on its surface and is treated to prevent sticking to the resist.