Equipment: Nanospec reflectometer
Use: Local measurements of the thickness of optically transparent thin films on reflecting substrates.
General Information and Use
The Nanospec is used to measure the thickness of dielectric thin films such as silicon dioxide, silicon nitride and photoresist. It diffracts light from the halogen bulb and deuterium lamp into its component wavelengths from 200 to 900 nm. The spectrophotometer scans the light from short to long wavelengths and the microscope focuses this light onto the sample. The Nanospec then measures the resulting reflectance versus wavelength and, from this data, determines film thickness. The measurement range of the instrument is from 10 to 500,000Å, with the UV deuterium lamp required for film thickness under 100Å.
Click here to view a map to the Nanospec.
Operating Instructions and Training
There is no log book for this tool.
Training is accomplished through a metrology tutorial. See the PRISM MNFL staff for more information.
Contact Information for Users
For additional information regarding this machine, please contact the PRISM Staff at: MNFL-Staff@princeton.edu.