Manufacturer: Olympus, Nikon, Leitz, and Meiji
Equipment: Optical microscopes with cameras
- Feature size and alignment measurements
General Information and Use
The Olympus MX40 located in the metrology room is a high-resolution, reflected-light, optical microscope for 6-inch wafer inspection. In addition to brightfield and darkfield, the microscope offers linearly polarized light and Nomarski DIC (differential interference contrast) sample inspections. The microscope is equipped with 10X eyepieces, 1X-2X variable magnifier, and six objectives (2.5X, 5X, 10X, 20X, 50X, and 100X). The 50X and 100X objectives have a long working distance of 1 mm. The microscope has a digital camera attached with a resolution of up to 4080 x 3072 pixels.
The Olympus MX51 located in the photolithography room is a high-resolution, reflected and transmitted light, optical microscope for 6-inch wafer inspection. The transmitted light illumination is used for photomask inspection. The microscope offers brightfield and darkfield sample inspections. The microscope is equipped with 10X eyepieces and five objectives (5X, 10X, 20X, 50X, and 100X). The 50X and 100X objectives have a long working distance of about 1 mm. The microscope has a digital camera attached with a resolution of up to 4080 x 3072 pixels.
Other instruments include a Nikon Optiphot microscope located in the Bowen Hall packaging lab which also has a Fuji digital camera attached, A Leitz SM LUX-HL microscope in the plasma etch room, and a Meiji ML-BD-MET located in the lapping room (J402).
Click here for a map to the Olympus MX40.
Click here for a map to the Olympus MX51.
Click here for a map to the other microscopes.
Operating Instructions and Training
There are no log books for these tools.
Users are trained and qualified to use the microscopes, along with several other metrology tools, in a single session tutorial. See the MNFL staff for details.
Reservations are not required for the microscopes.
Contact Information for Users
For additional information regarding these machines, please contact the PRISM Staff at: MNFL-Staff@princeton.edu