Manufacturer: Olympus, Nikon, Leitz, and Meiji
Equipment: Optical microscopes with cameras
-Feature size and alignment measurements
Operating Instructions and Training:
Please follow the provided authorization and training form.
- There are no log books for these tools.
- Users are trained and qualified to use the microscopes, along with several other metrology tools, in a single session tutorial. See the MNFL staff for details.
- Reservations are not required for the microscopes.
For additional information regarding these machines, please contact the PRISM Staff at: MNFL-Staff@princeton.edu
General Information and Usage
The Olympus MX40 located in the metrology room is a high-resolution, reflected-light, optical microscope for 6-inch wafer inspection. In addition to brightfield and darkfield, the microscope offers linearly polarized light and Nomarski DIC (differential interference contrast) sample inspections. The microscope is equipped with 10X eyepieces, 1X-2X variable magnifier, and six objectives (2.5X, 5X, 10X, 20X, 50X, and 100X). The 50X and 100X objectives have a long working distance of 1 mm. The microscope has a digital camera attached with a resolution of up to 4080 x 3072 pixels. (Due to the large number of user images being stored on the hard drive, a 128 GB memory stick has been installed on one of the USB ports to provide additional data storage space. The staff will move user files as needed to provide necessary free hard drive space.)
The Olympus MX51 located in the photolithography room is a high-resolution, reflected and transmitted light, optical microscope for 6-inch wafer inspection. The transmitted light illumination is used for photomask inspection. The microscope offers brightfield and darkfield sample inspections. The microscope is equipped with 10X eyepieces and five objectives (5X, 10X, 20X, 50X, and 100X). The 50X and 100X objectives have a long working distance of about 1 mm. The microscope has a digital camera attached with a resolution of up to 4080 x 3072 pixels.
Other instruments include a Nikon Optiphot microscope located in the Bowen Hall packaging lab which also has a Fuji digital camera attached, A Leitz SM LUX-HL microscope in the plasma etch room, and a Meiji ML-BD-MET located in the lapping room (J402).
Click here for a map to the Olympus MX40.
Click here for a map to the Olympus MX51.
Click here for a map to the other microscopes.