Manufacturer: SAMCO International
Classification: Dry Etch
Equipment: Inductively coupled plasma etching
-Deep etching Si and SiO2, and resist stripping
-Etch gases O2, C4F8, CF4, and SF6
Operating Instructions and Training:
Please follow the provided authorization and training form.
For additional information regarding this machine, please contact the PRISM Staff at: MNFL-Staff@princeton.edu.
General Information and Usage
The SAMCO International RIE800iPB is a state of the art inductively coupled plasma etcher, optimized for deep Si etching using the Bosch process.
Click here to view a map to the SAMCO RIE800iPB.