Thermco/Brute IV
Manufacturer: Therma
Classification: Thermal Process
Equipment:
Use:
General Information and Usage
The Thermco furnaces are a stack of 3 horizontal furnaces used for anneal and oxidation of 4" Si wafers, as well as smaller Si samples.
Each furnace is designated for a specific kind of anneal/oxidation, and can flow different gases as described below:
| Furnace | Use | Gases |
| 1 | Clean metal anneal (only Ti or Al allowed) (NO organics, glass or steel) |
N2, forming gas |
| 2 | Metal, glass, steel, organics, etc. anneal and oxidation |
N2, Dry O2 |
| 3 | Clean Si ONLY anneal and oxidation (No metal, organics, etc.) |
N2, Dry O2, Wet O2 |
Click here to view a map to the Thermco/Brute IV.
Operating Instructions and Training
Please follow the provided authorization and training form after contacting a representative from Prof. Sturm's group for permission to use this furnace.
Contact Information for Users
For additional information regarding this machine, please contact the PRISM Staff at: MNFL-Staff@princeton.edu.
Authorized Users
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