Classification: Thermal Process
General Information and Usage
The Thermco furnaces are a stack of 3 horizontal furnaces used for anneal and oxidation of 4" Si wafers, as well as smaller Si samples.
Each furnace is designated for a specific kind of anneal/oxidation, and can flow different gases as described below:
|1||Clean metal anneal (only Ti or Al allowed)
(NO organics, glass or steel)
|N2, forming gas|
|2||Metal, glass, steel, organics, etc.
anneal and oxidation
|N2, Dry O2|
|3||Clean Si ONLY anneal and oxidation
(No metal, organics, etc.)
|N2, Dry O2, Wet O2|
Click here to view a map to the Thermco/Brute IV.
Operating Instructions and Training
Please follow the provided authorization and training form after contacting a representative from Prof. Sturm's group for permission to use this furnace.
Contact Information for Users
For additional information regarding this machine, please contact the PRISM Staff at: MNFL-Staff@princeton.edu.