Varian / ML91
Equipment: Sealed ampule diffusion
Use: Glass ampoule sealing station for diffusion
General Information and Usage
This apparatus is used to Evacuate and seal III-V wafers and ZnAs diffusion source) within a quartz Ampoule. The sealed ampoule is then placed inside a furnace for a period of time. The ampoule is then cut open and the sample is removed.
Operating Instructions and Training
Please follow the provided authorization and training form after contacting Mike Lange or Joe Palmer.
Contact Information for Users
For additional information regarding this machine, please contact the PRISM Staff at: MNFL-Staff@princeton.edu.