Varian / ML91
Manufacturer: Varian
Classification: Miscellaneous
Equipment: Sealed ampule diffusion
Use: Glass ampoule sealing station for diffusion
General Information and Usage
Using this setup is dangerous. Besides the high temperatures, and the necessity of learning the skill of quartz welding, there is the general hazard of using hydrogen/oxygen flames. When hydrogen burns in oxygen, most of the energy is released in the infrared; thus, the flame is almost invisible.
This apparatus is used to Evacuate and seal III-V wafers and ZnAs diffusion source) within a quartz Ampoule. The sealed ampoule is then placed inside a furnace for a period of time. The ampoule is then cut open and the sample is removed.
This apparatus is used to Evacuate and seal III-V wafers and ZnAs diffusion source) within a quartz Ampoule. The sealed ampoule is then placed inside a furnace for a period of time. The ampoule is then cut open and the sample is removed.
Contact the prism staff in order to use the machine.
Operating Instructions and Training
Please follow the provided authorization and training form after contacting Mike Lange or Joe Palmer.
Contact Information for Users
For additional information regarding this machine, please contact the PRISM Staff at: MNFL-Staff@princeton.edu.