Yield Engineering Systems / YES-310TA
Manufacturer: Yield Engineering System
Equipment: Image Reversal Oven
- Vacuum baking, image reversal lithography, vapor prime process
Operating Instructions and Training:
Please see MNFL Staff for training after reading the operating instructions, and recording three observations on the machine authorization form.
For additional information regarding this machine, please contact the PRISM Staff at: MNFL-Staff@princeton.edu.
General Information and Usage
Yield Engineering Systems has combined the most effective application methods of vacuum baking and vapor priming. By utilizing the same chamber, the system creates a heated vacuum environment for dehydration and vapor priming, greatly reducing the risks of rehydration or contamination of the wafers.