Yield Engineering Systems / YES-310TA
Manufacturer: Yield Engineering System
Equipment: Image Reversal Oven
Use: Vacuum baking, image reversal lithography, vapor prime process
Yield Engineering Systems has combined the most effective application methods of vacuum baking and vapor priming. By utilizing the same chamber, the system creates a heated vacuum environment for dehydration and vapor priming, greatly reducing the risks of rehydration or contamination of the wafers.
Operating Instructions and Training
Please see MNFL Staff for training after reading the operating instructions, and recording three observations on the machine authorization form.
Contact Information for Users
For additional information regarding this machine, please contact the PRISM Staff at: MNFL-Staff@princeton.edu.