NSL Lab Facilities

 

Cleamroom Facilities  Entrance to NSL office area Cleanroom Office

Fabrication Equipment  SEM/E-beam Lithography system, JEOL-840 Nanoimprint lithography system (custom built) Reactive Ion Etching, PlasmaTherm-2486 Sputtering System, Perkin Elmer-4400 Ion Beam Etching System (custom built) E-Beam Evaporator Plasma Metal Coater for SEM samples, Hummer

Microscopy and Optical Charaterization Equipment   AFM/SEM/MFM system, Digital Instruments AFM/nanolithography system, Park Sci. Inst. Nikon Optical Microscope (1,000x), with camera Zeiss Microscope (800x), with camera Nikon Stereo Microscope Microzoom microscope (500x), 2 units

Electronics   Wafer probe station, Sigmatone-6000 HP4145B Semiconductor Parameter Analyzer HP8569B Spectrum Analyzer, 22 GHz HP 4140B Picoammeter/DC Volt Source HP Signal Generator, 5 units HP Power Supply, 24 units Digital Multimeters 5 units Keithley-240, Voltage Source, 4 units Keithley-261 Picoammeter Souce, 3 units Keithley-485 Picoammeter, 4 units Keithley-619 Electrometer, 2 units Tektronix Curve Tracer, 576 Tektronix Oscilloscope, 7704 Tektronix Oscilloscope, 2235 Other Signal Generator, 3 units Lock-in Amplifier, 6 units SR Signal Generators, 3 units

Low Temperature Characterization Equipment  15 - 17 T Supercomputer Magnet System with a 1.2 - 300 K Temperature Insert, Oxford Inst. He3 Refrigerators (0.3 - 300 K), Oxford Inst., Heliox

Nanomagnetics Equipment  Magnetic Force Microscopes (Atmosphere and Vacuum) with Custom Built Magnets Vibrating Sample Magnetometer Magnetooptic Kerr-Effect Microscopes

Optoelectronics Characterization Equipment   Agilent 8164A Lightwave Measurement System (1456 nm - 1584 nm) HP 86142A Optical Spectrum Analyzer (1200 nm - 1700 nm) Melles Griot Nanotrak 17MNA001 Waveguide Alignment System (20nm resolution) ElectroPhysics 7290A Infrared CCD camera SPEX 750M Monochrometer Wavelength (700 - 10,000 nm) Tunable Femtosecond Ti-Sapphire Laser, Coherent Mira 900F Pumped by an Argon Ion Laser, Coherent-308 BBO Frequency Doubler, Spectra Physics Series 3000 YAG Laser (100 ps Pulse) Spectra Physics Series 3690 Pulse Compressor (5 ps Pulse) Autocorrelator, 50 fs, Femtochrome Coherent-103 Terahertz Electrooptical Sampling System Optical Tables, 4 units Various Optical Mounts, Precision Positioners, Lenses, Polarizers, Waveplates and Beam Splitters Optical Powermeters, 3 units LN Cooled Ge Photodetectors Photomultipliers with Electrothermal Coolers High Voltage Power Supplies Optical Modulators and Isolators, and etc.

Computers and Accessories  SUN Workstations, 2 units Mac's, 5 units PC's, 6 units Laser Printers, 4 units Textronics Color Printer, Phaser 440, 1 unit

Miscellaneous  Wire Bonders Vacuum Stations Electroplating System (Computer Automated for Multilayers) Lap machines, 3 units