Four chamber UHV cluster tool: spearate chambers for intrinsic and doped layer growth by in situ evaporation connected to two analysis chambers

Measurement techniques:

- Ultra-Violet Photoemission Spectroscopy (UPS)

- X-ray Photoemission Spectroscopy (XPS)

- Inverse Photoemission Spectroscopy (IPES)

- Low-Energy Electron Diffraction (LEED)

- Auger Electron Spectroscopy (AES)

- In-situ Current-Voltage Measurement (IV)

- Kelvin Probe (KP)