Topics
Fabrication services
Fabrication processes
Simple cross section
Photolithography
Process steps
Process steps, cont’d.
Process steps, cont’d
Transistor structure
0.25 micron transistor (Bell Labs)
Transistor layout
Drain current characteristics
Drain current
0.5 ?m transconductances
Current through a transistor
Basic transistor parasitics
Basic transistor parasitics, cont’d
Latch-up
Parasitic SCR
Parasitic SCR structure
Solution to latch-up
Tub tie layout
Email: wolf@princeton.edu
Home Page: http://www.ee.princeton.edu/~wolf/vlsi-book
Other information: (c) 2002 Prentice Hall PTR
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