Topics
Wires and vias
Metal migration
Metal migration problems and solutions
Diffusion wire capacitance
Depletion region capacitance
Poly/metal wire capacitance
Metal coupling capacitances
Example: parasitic capacitance measurement
Wire resistance
Mean-time-to-failure
Skin effect
Skin effect, cont’d
Skin depth
Effect on resistance
Transistor gate parasitics
Transistor source/drain parasitics
Email: wolf@princeton.edu
Home Page: http://www.ee.princeton.edu/~wolf/vlsi-book
Other information: (c) 2002 Prentice Hall PTR
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