Phase Diagrams 
Table of Contents
 Metal-Oxide-Semiconductor Devices
· The diagram shows an MOS device that employs silicon technology. The interconnections between the active components of the structure are an Al-Cu alloy, and tungsten studs are used to make connections between the layers of the six-layer structure. Device dimensions are at the 0.5 micron scale and layer thicknesses are on the order of a few hundred nanometers.


last modified: 6/20/2001 9:16:20 AM