Optical trap assisted nanopatterning

The OTAN technique, developed by our group, brings laser direct-write a step smaller. This probe-based near field technique uses a microlens that is optically trapped above the substrate to create arbitrary sub-wavelength features on a surface. The key features include easy parallelization and the ability to process rough substrates.

Featured publications

  • Microbead dynamics in OTAN

    R. Fardel, Y.-C. Tsai, and C. B. Arnold, Appl. Phys. A (2012) uses high-speed microscopy to show that gas bubbles can be formed from the laser pulse during Optical Trap Assisted Nanopatterning (OTAN) resulting in temporary bead displacement during operation.

  • OTAN multiphoton absorption polymerization

    Y.-C. Tsai, K.-H. Leitz, R. Fardel, M. Schmidt, and C. B. Arnold, Physics Procedia (2012) combines the strengths of multiphoton absorption and near field effects using optical trap assisted nanopatterning (OTAN) to generate sub 100 nm features.

  • Laser direct-write parallel nanopatterns on rough surfaces

    Y.-C. Tsai et. al., IOP Nanotech. (2012) generates parallel nanofeatures on rough surfaces with vertical steps more than 1.5 μm and feature variation smaller than 4% using OTAN. A Brownian motion model is used to describe and predict the lateral positional accuracy of the system. | Full text | View at publisher

  • Array-based optical nanolithography using laser trapped microlenses

    E. Mcleod & C.B. Arnold, Optics Express (2009) modifies the OTAN technique to include an array of optically trapped nanospheres capable of fabricating multiple identical nanoscale (~100 nm) structures in parallel using 355 nm light. Feature size uniformity and relative positioning accuracy better than 15 nm was demonstrated. | Full text | View at publisher

  • Subwavelength direct-write nanopatterning using optically trapped microspheres

    E. Mcleod & C.B. Arnold, Nature Nanotechnology (2008) presents a novel laser direct write nanopatterning technique using an optically trapped microsphere as an objective lens. This method was used to create arbitrary patterns with feature sizes of ~100 nm (less than a third of the processing wavelength) and a positioning accuracy better than 40 nm in aqueous and chemical environments. Submicron spacing is maintained between the microsphere and the substrate without active feedback control. | Full text | View at publisher

  • All OTAN publications

    1. R. Fardel and C. B. Arnold, “Microbead dynamics in optical trap assisted nanopatterning,“ Applied Physics A (2013) | Full text | View at publisher
    2. Y.Tsai, K-H. Leitz, R. Fardel, M.Schmidt, and C. B. Arnold, “Generating nanostructures with multiphoton absorption polymerization using optical trap assisted nanopatterning,” Physics Procedia, 39, 669-673 (2012) | Full text | View at publisher
    3. Y.-C. Tsai, K.-H. Leitz, R. Fardel, A. Otto, M. Schmidt, and C. B. Arnold, "Parallel optical trap assisted nanopatterning on rough surfaces," IOP Nanotech., 23 165304 (2012)| Full text | View at publisher
    4. Y.-C. Tsai, R. Fardel, and C. B. Arnold, “Nanopatterning on rough surfaces using optically trapped microspheres,” Appl. Phys. Lett. 98, 233110 (2011) | Full text | View at publisher
    5. R. Fardel, Y. Tsai, and C. B. Arnold, “Self-positioning effects in optical trap assisted nanopatterning”, Proceedings of 2011 NSF Engineering Research and Innovation Conference, (2011) (non-referreed meeting paper)
    6. Y. Tsai, R. Fardel, and C. B. Arnold, “Generating submicron features on rough surfaces using optical trap assisted nanopatterning”  AIP Proceedings 1278, 457-464 (2010) | Full text | View at publisher
    7. R. Fardel, E. McLeod, Y. Tsai, and C. B. Arnold, “Nanoscale ablation through optically trapped microspheres”  Appl. Phys. A. 101, 41-46 (2010) | Full text | View at publisher
    8. E. Mcleod and C. B. Arnold, “Array-based optical nanolithography using laser trapped microlenses,” Optics Express, 17, 3640-3650 (2009) | Full text | View at publisher
    9. E. McLeod and C. B. Arnold, “Subwavelength direct-write nanopatterning using optically trapped microspheres,” Nature Nanotechnology, 3, 413-417(2008) | Full text | View at publisher